Tube device, and piping system including the tube device

ABSTRACT

A tube  4  includes a casing  1  made of a fluororesin. The casing  1  surrounds a fluid tube  3  and lid members  5  each made of a fluororesin and include a receiving portion  8  for receiving one end portion of the tube  4 . At least one sealing face  10  is disposed in the receiving portion. Union nuts  6 , made of a fluororesin, are fitted onto the end portion of the tube  4  and screwed to one end portion of one of the lid members  5 . A sealing portion  19  is formed by fastening the union nuts  6  to the end portions of the lid members  5  to press the tube  4  from the outside of the tube  4 . A device element such as a filter member  3  is placed in the casing  1.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a tube device which is useful in anapparatus for producing semiconductor devices, liquid crystal displaydevices, or chemicals, a production line for foods, or the like, andalso to a piping system including such a tube device.

2. Description of the Prior Art

In a piping system in an apparatus for producing semiconductor devices,liquid crystal display devices, or chemicals, a production line forfoods, or the like, higher integrity is required in accordance with thepurpose of the piping system. In a piping system for an apparatus forproducing semiconductor devices, for example, the number of cleaningsteps in various cleaning apparatuses which provide one solution for asemiconductor wet process goes on increasing as the integration of asemiconductor device is advanced. Therefore, cleanness of a cleaningprocess is requested to attain higher integrity. Consequently, severerrequirements are imposed on the technique for cleanly supplying cleaningliquid containing ultrapure water or chemical to a cleaning apparatus.In the current state of the art, chemical is contaminated in processesof mixing, diluting, and transporting in a chemical supplying system.However, the wafer cleanliness must cope with the sub-quarter micronage. As a chemical supplying system, known is a system of the masspreparation type. In the system, chemical is pumped from a receivingtank to a diluting and mixing tank to be adjusted to a desiredcomposition or concentration, further pumped from a supplying tankthrough a long-distance pipe to a storage tank in a wet station, andthen supplied via a pump and a filter to a cleaning tank (for example,see Japanese Patent Application Laying-Open Nos. 2000-265945 and11-70328).

An example of various tube devices which can be applied to a pipingsystem of such an apparatus for producing semiconductor devices is aheat exchanger shown in FIGS. 19 and 20. The heat exchanger isconfigured so that a sufficient sealing property is ensured in a casing71 through which heat exchange pipes 70 are passed, thereby enabling thecasing to withstand an internal pressure of an adequate level. The heatexchanger is structured in the following manner (for example, seeJapanese Patent Application Laying-Open No. 10-160362). The body of thecasing 71 is formed by a cylindrical shell 72. A plurality of metalfastening members 73 such as tie rods or through-bolts are placedparallel to one another on the outer periphery of the shell 72 so as toelongate in the longitudinal direction of the shell. Then both endportions of each of the metal fastening members 73 are passed throughlid members 74 which are placed on the end portions of the shell 72,respectively. Nuts 75 are fastened to external thread portions of theends of the metal fastening members 73 which project from the lidmembers 74, so that the interfaces between the ends of the shell 72 andbutting faces of the lid members 74 are closely sealed. As a result, thecasing 71 is hermetically sealed. Furthermore, O-rings 76 serving assealing members are interposed between the ends of the shell 72 and thebutting faces of the lid members 74 (see Japanese Patent ApplicationLaying-Open No. 10-160362).

In such a chemical supplying system of the mass preparation type, it isrecognized as a problem that particles or metal contaminations areproduced from various liquid-contacting portions of components of alldevices including storage tanks, pipes, joints, pumps, heat exchangers,flow meters, filters, and deaerating modules.

On the other hand, an enhanced cleaning speed in a substrate cleaningapparatus for cleaning a semiconductor wafer or the like causes aproblem in that the whole apparatus is increased in size andcomplicated. Particularly, a piping system which is configured byvarious devices is placed in a clean room, and hence requested to beminiaturized and made more compact.

In various tube devices, since metal materials are often used, metalcontaminations are produced, and the device shape is fixed. Therefore,the piping system has a low degree of freedom in design, a dead space iseasily caused in pipes, and the piping system tends to be increased insize. As a result, in such tube devices including machines such as acleaning apparatuses, reductions in size and cost are limited. Moreover,there is no device having a shape which can flexibly satisfy a requestfor modifying an existing piping system. Consequently, modification of apiping system is largely restricted in space.

In the heat exchanger (tube device) in which the interfaces between theend portions of the shell 72 and the lid members 74 are sealed byfastening the nuts 75 to the metal fastening members 73 such as tie rodsor through-bolts, a large number of components are used for attainingthe sealing, and hence the cost and size of the casing structure areincreased. In the case where the heat exchanger is installed in a placewhich is exposed to the sulfuric acid atmosphere or the like, the metalfastening members 73 easily corrode and metal pollution inevitablyoccurs. Recently, it is therefore highly requested to restrict the useof such metal fastening members in, particularly, the field ofsemiconductor devices.

In order to avoid loosing of the metal fastening members 73, it isnecessary to periodically refasten the metal fastening members 73.However, the metal fastening members 73 are generally used in a pluralor at least four number, and hence the degrees of refastenings of themetal fastening members 73 are easily dispersed. This dispersion maycause the lid members 74 and the shell 72 to be deformed. When the lidmembers 74 or the shell 72 is deformed, twisting or distortion isproduced between the end portions of the shell 72 and the lid members74, thereby causing a problem in that local stress concentration occursto promote development of creep. Moreover, the center axis of a metaltie rod serving as one of the metal fastening members 73 fails tocoincide with that of a metal sheath for the tie rod, and the rod andthe sheath rub with each other to cause problems in that the slidingresistance is increased, and that abrasion dust containing metal powderis produced. When the shell 72 or the lid members 74 are deformed, sucha component must be replaced with a new one. Usually, these componentsare formed as machined articles, and therefore relatively expensive.Consequently, the heat exchanger has a configuration where reuse inwhich a device element (for example, the heat exchange pipes 70) remainsto be used also after the casing structure is replaced with a new one ishardly conducted.

In the heat exchanger having the connecting structure in which theO-rings 76 serving as sealing members are interposed between the endportions of the shell 72 and the butting faces of the lid members 74,the corrosion resistance and the service temperature range arerestricted by the use of the O-rings 76. For example, chemical of a hightemperature cannot be passed through a space which is in contact withthe O-rings 76. Furthermore, dust produced from the O-rings 76 may causea pollution problem. In the recent field of semiconductor devices,therefore, it is highly requested to restrict the use of such O-rings.

In the case where a heat exchanger of this kind is to be used forchemical or the like, the shell 72, the lid members 74, and likecomponents are often made of a fluororesin having excellent corrosionresistance, such as PTFE or PFA. However, a fluororesin has highlubricity, and hence creep due to vibration or heat of a pipe occurs inthe connecting portions between the shell 72 and the lid members 74. Asa result, there arises a problem in that the metal fastening members 73such as tie rods or through bolts are loosened and fluid leakage fromthe connecting portions in the ends of the shell 72 is caused.

Alternatively, thread sealing or welding may be employed as the casingconnecting structure between the shell 72 and the lid members 74.However, these measures are not highly effective. In a sealing structurewhich is based simply on threads, a high sealing property cannot beobtained, the pressure resistance is not sufficiently high, and leakagedue to creep easily occurs. Usually, welding requires a skilledtechnique, and cannot be conducted by an easy work. Therefore, thestructure due to welding has problems in that the production efficiencyis low, that the on-site workability is poor, and that it is difficultto conduct maintenance and inspection on the site.

The invention has been conducted in order to solve the problems. It isan object of the invention to provide a tube device in which metalmembers such as a metal fastening member are not used and all componentscan be made of a synthetic resin, whereby the problems of metal elutionand production of metal abrasion powder can be solved, and which ispreferably used in an apparatus for producing semiconductor devices, andalso a piping system including such a tube device.

It is another object of the invention to provide a tube device which canreduce the sizes of various devices, and miniaturize and compactly forma piping system, and which is preferably used in an apparatus forproducing semiconductor devices, and also a piping system including sucha tube device.

It is a further object of the invention to provide a tube device inwhich the number of components, and the production cost can be reducedwithout using a metal fastening member such as a tie rod or athrough-bolt, and an O-ring, which has a casing structure of highpressure resistance, and a sealing structure of high reliability, andwhich is preferably used in an apparatus for producing semiconductordevices, and also a piping system including such a tube device.

It is a still further object of the invention to provide a tube devicewhich, even when all components are made of a fluororesin, can ensure ahigh sealing property, and can be applied to and installed in achemically resistant atmosphere, and also a piping system including sucha tube device.

SUMMARY OF THE INVENTION

The tube device of the invention is a tube device including a casing,and a device element which is placed in the casing, wherein the casingcomprises: a tube made of a synthetic resin; a pair of lid members whichare made of a synthetic resin, and each of which comprises a receivingport for receiving an end portion of the tube, and at least one sealingface disposed in the receiving port; a pair of union nuts which are madeof a synthetic resin, which are fitted onto one and other end portionsof the tube, and which are screwed to end portions of the lid membershaving the receiving ports, respectively; and a sealing portion which isformed in at least one place for each of the end portions of the tube byclosely contacting the end portion of the tube with the sealing face ofcorresponding one of the lid members, the end portion of the tube andthe sealing face of the lid member being closely contacted with eachother by causing corresponding one of the union nuts to press the tubefrom an outside of the tube, the union nut fastening the end portion ofthe lid member by screw advancement toward the end portion of the lidmember, thereby pressing the tube from the outside of the tube.According to the configuration, it is possible to attain the objects.

The piping system of the invention includes a pipe conduit, and theabove-mentioned tube device which is placed in a middle of the pipeconduit.

In this case, all of the tube, the lid members, and the union nuts maybe molded of a fluororesin having excellent heat resistance andcorrosion resistance, or an antistatic fluororesin containing anelectrically conductive material.

Examples of the device element are as follows. For example, the deviceelement may be configured by: a heat exchange tube which is made of afluororesin, and which is passed through the casing; and connectingportions to which pipes for introducing and discharging a fluid that ispassed between an inner side of the casing and an outer side of the heatexchange tube are connected, respectively. According to theconfiguration, the tube device can be configured as a heat exchanger.When the device element is a filter member housed in the casing, thetube device can be configured as a filter device. When the deviceelement is configured by an ultrasonic oscillator and an ultrasonicreceiver which are used for an ultrasonic flow meter, and which areincorporated in the lid members in the ends of the tube, respectively,the tube device can be configured as an ultrasonic flow meter. When thedevice element is an air vent valve incorporated in one of the lidmembers, the tube device can be configured as a deaerating device. Whenthe device element is configured by gas-permeable tubes which are passedthrough the tube, and a deaerating port which is disposed in one of thelid members, the tube device can be configured as a deaerating module.When the device element is configured by gas-permeable tubes which arepassed through the tube, and a soluble gas supplying port which isdisposed in one of the lid members, the tube device can be configured asa gas dissolving device.

The thus configured tube device can be surely hermetically sealed by thesealing portion in which the end portion of the tube and the sealingface of the lid member are closely contacted with each other by a simpleoperation of fastening the union nut to an end portion of the lidmember. Therefore, it is possible to obtain a tube device in which,unlike the conventional art, the number of components, and theproduction cost can be reduced without using a metal fastening membersuch as a tie rod or a through-bolt, and an O-ring, and which has acasing structure of high pressure resistance, and a sealing structure ofhigh reliability, and also a piping system including such a tube device.

In the tube device, a pressure-tight sealing structure in which, unlikethe conventional casing connecting structure, tie rods or through-boltsare not used, and a slim casing structure can be realized, and thesealing property can be uniformly ensured by refastening a single unionnut. In the tube device, namely, a sealing structure which is higher inreliability than the case where tie rods or through-bolts are used canbe obtained simply by sealing each of the connecting portions betweenthe end portions of the tube and the lid members with the single unionnut. Moreover, the tube device having the slim casing enables a pipingsystem to be miniaturized and compacted. In the tube device, the sealingproperty can be ensured at any time by refastening the union nuts, andhence the reliability is maintained to be high for a longer term ascompared with the case where thread sealing or O-ring sealing is used.In the tube device, it is necessary only to conduct only simple meansthat the single union nut is refastened. Unlike the connecting structuredue to welding, therefore, the work on the site is facilitated, andmaintenance and inspection on the site can be easily conducted.

Since no metal member such as a metal fastening member is used, it ispossible to solve the problems of metal elution and production of metalabrasion powder.

When the union nut is fastened, the whole outer circumference of the endportion of the tube can be uniformly pressed, and hence the tube and thelid member are prevented from being accidentally deformed. Therefore, itis possible to solve the problems of creep and replacement of thesemembers.

When the union nut is loosened, the lid member can be easily detachedfrom the end portion of the tube. Therefore, stagnate fluid whichstagnates in the tube can be easily removed away.

In the tube device to be placed in a pipe conduit of the piping system,even when an internal pressure arises in the tube, the air tightness canbe maintained simply by the fastening of the union nut, and fluidleakage can be prevented from occurring. Unlike the conventional art,therefore, the use of an O-ring can be eliminated, and all thecomponents can be molded of a fluororesin. As a result, the tube devicecan sufficiently cope with high-temperature and strong corrosivechemical, and can be applied to and installed in a chemically resistantatmosphere.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram showing the whole configuration of an apparatus forcleaning a semiconductor wafer (substrate) including a chemical supplypiping system which is an example of the piping system of the invention;

FIG. 2 is a section view of a heat exchanger which is an example of thetube device of the embodiment of the invention shown in FIG. 1;

FIG. 2 a is a fragmentary view of an outlet port of the heat exchangershown in FIG. 2;

FIG. 2 b is a fragmentary view of an outlet port of the heat exchangershown in FIG. 2;

FIG. 3 is an enlarged section view of a structure for connecting an endportion of a tube and a lid member of the heat exchanger of FIG. 2;

FIG. 4 is a section view showing another example of the heat exchangetube of the heat exchanger of FIG. 2 in a manner corresponding to FIG.2;

FIG. 5 is a section view showing a further example of the heat exchangetube of the heat exchanger of FIG. 2 in a manner corresponding to FIG.2;

FIG. 6 is a section view showing a still further example of the heatexchange tube of the heat exchanger of FIG. 2 in a manner correspondingto FIG. 2;

FIG. 7 is a section view of a filter device which is another example ofthe tube device of the embodiment of the invention;

FIG. 8 is a section view showing another example of the filter device ofthe embodiment of the invention;

FIG. 9 is a section view of an ultrasonic flow meter which is a furtherexample of the tube device of the embodiment of the invention;

FIG. 10 is a section view of a manual deaerating device which is a stillfurther example of the tube device of the embodiment of the invention;

FIG. 11 is a section view of an automatic deaerating device which is astill further example of the tube device of the embodiment of theinvention;

FIG. 12 is a section view of a deaerating module which is a stillfurther example of the tube device of the embodiment of the invention;

FIG. 13 is a section view showing another example of a casing of thetube device of the embodiment of the invention;

FIG. 14 is a section view showing a further example of the casing of thetube device of the embodiment of the invention;

FIG. 15 is a section view showing another example of a sealing portionof the tube device of the embodiment of the invention;

FIG. 16 is a section view showing a further example of the sealingportion of the tube device of the embodiment of the invention;

FIG. 17 is a section view showing a still further example of the sealingportion of the tube device of the embodiment of the invention;

FIG. 18 is a section view showing a still further example of the sealingportion of the tube device of the embodiment of the invention;

FIG. 19 is a front view of a tube device (heat exchanger) of aconventional art example; and

FIG. 20 is a section view of the heat exchanger of FIG. 19.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Preferred embodiments of the invention will be described with referenceto the accompanying drawings.

FIG. 1 is a diagram showing the whole configuration of an apparatus forcleaning a semiconductor wafer (substrate) including a chemical supplypiping system which is an example of the piping system of the invention.In the figure, A denotes a cleaning chamber in which a wafer (substrate)W is disposed to be cleaned, and B denotes a chemical supply pipingsystem which produces cleaning liquid of a desired concentration andsupplies the liquid to the cleaning chamber A. The chemical supplypiping system B comprises: a chemical storage tank 100 which storeschemical in an undiluted state; a chemical supplying apparatus 101 whichis connected to the chemical storage tank 100, and which supplies thechemical; a supply pipe 102 which is connected to the chemical supplyingapparatus 101, and which functions as a path of ultrapure water mixedwith the chemical; a pair of ejection nozzles 103, 104 which aredisposed in a downstream portion of the supply pipe 102 so as to beopposed to surfaces of the wafer W disposed in the cleaning chamber A;and a control system 105 which adjusts various states such as theconcentration and flow amount of the cleaning liquid supplied from theejection nozzles 103, 104.

The chemical supplying apparatus 101 comprises: a chemical supplyingpump 106; a connecting pipe 107 which connects the supply pipe 102 tothe chemical supplying pump 106 to form a flow path; and a capillary 108which directly connects the interior of the connecting pipe 107 to thatof the supply pipe 102. When the chemical supplying pump 106 is driven,the chemical is ejected from the capillary 108 into the ultrapure waterin the supply pipe 102.

In the supply pipe 102, disposed are: flow amount adjusting means 109for adjusting the flow amount of the ultrapure water passed through thesupply pipe 102; concentration adjusting means 110 for adjusting theconcentration of the cleaning liquid passed through the supply pipe 102;and mixing means 111, placed in a portion where the supply pipe 102 andthe capillary 108 are connected to each other, for producing a rotatingflow in the cleaning liquid to stir it, thereby uniformalizing thecleaning liquid.

The control system 105 comprises: chemical supply controlling means 112for adjusting the amount of the chemical to be supplied to the ultrapurewater by the chemical supplying pump 106, and for driving the flowamount adjusting means 109; and concentration controlling means 113 fordriving the concentration adjusting means 110. The chemical supplycontrolling means 112 and the concentration controlling means 113 areconnected to each other. A result of the concentration control by theconcentration controlling means 113 is fed back to the chemical supplycontrolling means 112 to control the chemical supplying pump 106,whereby the supply amount of the chemical is adjusted.

The invention is characterized in that a tube device selected fromvarious kinds of tube devices is disposed in an adequate place of thepipes in the chemical supply piping system B, and the tube device isconfigured in the following manner.

FIG. 1 shows an embodiment in which a heat exchanger 114 that is a tubedevice is disposed in the middle of the supply pipe 102 that is a pipeof the chemical supply piping system B. As shown in FIG. 2, the heatexchanger 114 conducts heat exchange between a fluid passed through aheat exchange tube 3 which is passed through the interior (heat exchangechamber) 2 of a casing 1, and that is passed between the interior of thecasing 1 and the outside of the heat exchange tube 3.

As shown in FIGS. 2 and 3, the casing 1 comprises: a tube 4 surroundingthe outer periphery of the heat exchange tube 3; a pair of lid members 5which hermetically close one and other end portions of the tube 4,respectively; and union nuts 6 which fasten the lid members 5 to the endportions of the tube 4, respectively.

The tube 4 is molded of a synthetic resin, for example, a fluororesinhaving excellent heat resistance and corrosion resistance, such as PFAor PTFE, or an antistatic fluororesin containing an electricallyconductive material, into a cylindrical shape. The lid members 5 whichare similarly made of a synthetic resin such as a fluororesin areinserted into the end portions of the tube 4, and connected thereto byfastening the union nuts 6 made of a synthetic resin such as afluororesin, respectively.

Each of the lid members 5 is formed into a shape having: a body wallportion 7; a receiving portion 8 which is opened in one end of the bodywall portion 7; and a bottom wall portion 9 which closes the other endof the body wall portion 7. As shown in FIG. 3, first to third sealingfaces 10 to 12 are disposed inside the receiving portion 8 of the lidmember 5. The first sealing face 10 is configured by a tapered facewhich is formed inner than the entrance of the receiving portion 8 ofthe lid member 5, and in which the diameter is gradually increased so asto intersect with the axis C of the lid member 5, or toward the outerside in the direction of the axis C. The second sealing face 11 isconfigured by a tapered face which is formed in the entrance of thereceiving portion 8, and in which the diameter is gradually increased soas to intersect with the axis C, or toward the outer side in thedirection of the axis C. The third sealing face 12 is configured by anannular groove 13 which is formed in an inner portion of the receivingportion 8 of the lid member 5 and in the radially outer side withrespect to the first sealing face 10, and which elongates parallel tothe axis C. An external thread portion 14 is formed on the outerperiphery of the receiving portion 8 of the lid member 5.

On the other hand, inner rings 15 made of a synthetic resin such as afluororesin are pressingly inserted into the one and other end portionsof the tube 4, respectively. As shown in FIG. 3, the inner rings 15 areformed into a sleeve-like shape having: a press-insertion portion 16which has an abacus bead-like section shape, and which is to bepressingly inserted into the corresponding end portion of the tube 4 toincrease the diameter of the end portion, thereby expanding the endportion so as to have a mountain-like section shape; and a projectionportion 17 which is continuous to the press-insertion portion 16, andwhich is to project from the end portion of the tube 4. In thepress-insertion portion 16 having an abacus bead-like section shape, anoutward tapered face 18 is formed on one inclined face of the portion,and an inward tapered face 20 which cooperates with the second sealingface 11 to pressingly hold the end portion of the tube 4 in an inclinedstate to form a second sealing portion 21 is formed on the otherinclined face. A projection end face 22 formed by a tapered face whichbutts against the first sealing face 10 to be in close contact therewithto form a first sealing portion 19, and a cylindrical portion 24 whichis to be fitted into the annular groove 13 to form a third sealingportion 23 are formed in the tip end of the projection portion 17. Theinner diameter of the inner ring 15 is set to be equal to orsubstantially equal to that of the tube 4, thereby allowing the fluidflowing through the inner ring 15 and the tube 4 to smoothly flowwithout stagnating in the interface between the inner ring 15 and thetube 4.

As shown in FIG. 3, an internal thread portion 25 which is to be screwedwith the external thread portion 14 of the lid member 5 is formed in theinternal periphery of the union nut 6, an annular flange 26 is inwardlyprojected from one end portion of the union nut 6, and a pressing edge26 a having an acute or right angle is disposed in an axially inner endof the inner peripheral face of the annular flange 26.

The end portion of the tube 4 into which the inner ring 15 is pressinglyinserted is inserted into the receiving portion 8 of the lid member 5,and the internal thread portion 25 of the union nut 6 which ispreviously loosely fitted to the outer periphery of the end portion ofthe tube 4 is screwed with the external thread portion 14 of the lidmember 5 to be fastened up. In accordance with this fastening, thepressing edge 26 a of the union nut 6 butts against an expansion basalportion of a long-diameter portion 27 of the tube 4 to axially press theinner ring 15. As a result, as shown in FIG. 3, the projection end face22 of the inner ring 15 is pressed against the first sealing face 10 ofthe lid member 5 to form the first sealing portion 19, and the endportion of the tube 4 is pressingly held in an inclined state betweenthe inward tapered face 20 of the inner ring 15 and the second sealingface 11 of the lid member 5, thereby forming the second sealing portion21. Furthermore, the cylindrical portion 24 of the inner ring 15 ispressingly inserted into the annular groove 13 to form the third sealingportion 23. The first to third sealing portions 19, 21, 23 exert asealing function of high reliability.

As shown in FIG. 2, the lid member 5 in the one end portion of the tube4 comprises a connecting portion 29 a to which a heat exchange fluidinlet pipe 28 a that is another pipe is to be connected, and the lidmember 5 in the other end portion comprises a connecting portion 29 b towhich an outlet pipe 28 b that is another pipe is to be connected. Theconnecting portions 29 a, 29 b which are to be connected to other pipesare configured in the following manner. An inlet port 30 for a heatexchange fluid such as temperature controlled water is formed in thebody wall portion 7 of the one lid member 5, and an outlet port 31 isformed in the body wall portion 7 of the one lid member 5. End portionsof the heat exchange fluid inlet and outlet pipes 28 a, 28 b areconnected respectively to the inlet and outlet ports 30, 31 via a unionnut 32 and an inner ring 33 which are made of a synthetic resin such asa fluororesin, so that the heat exchange fluid flows through the inletport 30, the heat exchange chamber 2 of the tube 4, and the outlet port31 in this sequence.

The internal structures of the inlet port 30 and the outlet port 31 areconfigured in the same manner as the internal structures (except thediameters) of the receiving portions 8 of the lid members 5. The innerrings 33 which are identical in section shape as the inner rings 15 forthe end portions of the tube 4 are pressingly inserted into end portionsof the heat exchange fluid inlet and outlet pipes 28 a, 28 b,respectively. In the end portions of the inlet and outlet pipes 28 a, 28b, the structures for connecting with the inlet port 30 and the outletport 31 are identical with those of the end portions of the tube 4 forconnecting with the receiving portions 8 of the lid members 5, and hencetheir detailed description is omitted. Alternatively, other means suchas that for directly welding or screwing the end portions of the heatexchange fluid inlet and outlet pipes 28 a, 28 b with the inlet port 30and the outlet port 31 may be employed as the structures for connectingthe end portions of the heat exchange fluid inlet and outlet pipes 28 a,28 b to the inlet port 30 and the outlet port 31. Namely, the connectingportions 29 a, 29 b may be realized by connecting means such as weldingor screw connection.

Referring to FIGS. 2, 2 a and 2 b, the heat exchange tube 3 formed by acoil tube which is made of a synthetic resin such as a fluororesin, andthrough which chemical is to flow is passed through the interior of thetube 4. The end portions of the heat exchange tube 3 are led out fromoutlet ports 34 which are opened in the bottom wall portions 9 of thelid members 5, respectively, and then connected to a middle portion ofthe supply pipe 102 of the pipe conduit of the chemical supply pipingsystem B, as shown in FIG. 1. Union nuts 35 made of a synthetic resinsuch as a fluororesin are fitted onto the led-out end portions of theheat exchange tube 3, respectively. The union nuts 35 are fastened tothe outlet ports 34 via ferrules 36 made of a synthetic resin such as afluororesin, whereby the gaps between the outlet ports 34 and the endportion of the heat exchange tube 3 are hermetically sealed.

In the thus configured heat exchanger, heat exchange is conductedbetween a fluid such as chemical passed through the interior of the heatexchange tube 3, and the heat exchange fluid such as temperaturecontrolled water passed through the outer side the heat exchange tube 3in the cylindrical casing body of the tube 4. In place of theconfiguration in which a fluid such as chemical is passed through theinner side of the heat exchange tube 3 and the heat exchange fluid suchas temperature controlled water is passed through the outer side of theheat exchange tube 3, an opposite configuration in which the heatexchange fluid such as temperature controlled water is passed throughthe inner side of the heat exchange tube 3, and a fluid such as chemicalis passed through the outer side of the heat exchange tube 3 may beemployed.

As shown in FIG. 4, alternatively, the end portions of the heat exchangetube 3 may be led out from outlet ports 34 which are opened in the bodywall portions 7 of the lid members 5, and the inlet and outlet ports 30,31 for a fluid such as chemical may be disposed in the bottom wallportions 9 of the lid members 5, respectively.

As shown in FIG. 5, alternatively, the heat exchange tube 3 throughwhich a fluid such as chemical or the heat exchange fluid such astemperature controlled water is passed may be formed by a singlestraight tube made of a fluororesin. In the alternative also, in thesame manner as the case shown in FIG. 3 in which the heat exchange tubeis formed by a coil tube, the end portions of the heat exchange tube 3are led out from outlet ports 34 which are opened in the bottom wallportions 9 of the lid members 5. Union nuts 37 made of a synthetic resinsuch as a fluororesin are fitted onto the led-out end portions of theheat exchange tube 3, respectively. The union nuts 37 are fastened tothe outlet ports 34 via ferrules 38 made of a synthetic resin such as afluororesin, whereby the gaps between the outlet ports 34 and the endportions of the heat exchange tube 3 are hermetically sealed.

As shown in FIG. 6, alternatively, the heat exchange tube 3 throughwhich a fluid such as chemical or the heat exchange fluid such astemperature controlled water is passed may be formed by plural straighttubes made of a fluororesin which are similar to those in theconventional heat exchanger shown in FIG. 20.

(Other Embodiments of the Tube Device)

In place of the heat exchanger 114, other devices such as filter devicesshown in FIGS. 7 and 8, an ultrasonic flow meter shown in FIG. 9, amanual deaerating device shown in FIG. 10, an automatic deaeratingdevice shown in FIG. 11, and a deaerating module shown in FIG. 12 may beemployed as the tube device. Each of the devices is disposed in anadequate place of the pipe conduit in the chemical supply piping systemB in accordance with its unique function.

Referring to FIG. 7, in the filter device 115, a filter member 203serving as a device element is housed in the casing 201. For example,the filter member 203 is configured in the following manner. Functionalpowder of ceramics, activated charcoal, titanium oxide, or a likematerial is carried in a carrier such as synthetic fibers. For example,pure water which flows into the casing from the inlet port 230 disposedin the lid member 205 is passed through the filter member 203 to beconverted to ultrapure water. Alternatively, an ion-exchange resin suchas silica gel may be carried in a carrier, and pure water or chemicalwhich flows into the casing from the inlet port 230 is passed throughthe filter member 203 to remove away metal ions contained in the purewater or chemical.

The casing 201 of the filter device 115 comprises: the tube 204; the lidmembers 205 which hermetically close the both end portions of the tube204, respectively; and the union nuts 206 which fasten the lid members205 to the end portions of the tube 204, respectively. The inlet port230 and the outlet port 231 disposed in the lid members 205 areconnected to adequate places of the pipe conduit of the chemical supplypiping system B, as shown in FIG. 1. The tube 204, the lid members 205,and the union nuts 235 are configured in the same manner as those of theheat exchanger 114 shown in FIG. 2. Therefore, the identical members andelements are denoted by the same reference numerals, and theirdescription is omitted.

FIG. 8 shows another example of the filter device. In the filter device116, the filter member 203 formed by a hollow fiber membrane serving asa device element is housed in the casing 201, and, for example, purewater is passed through the filter member 203 to be converted toultrapure water. Other configuration is identical with that of thefilter device 115 shown in FIG. 7. Therefore, the identical members andelements are denoted by the same reference numerals, and theirdescription is omitted.

Referring to FIG. 9, in the ultrasonic flow meter 117, in the samemanner as the case of the heat exchanger 114, the casing 201 comprises:the tube 204; the lid members 205 which hermetically close the both endportions of the tube 204, respectively; and the union nuts 206 whichfasten the lid members 205 to the end portions of the tube 204,respectively. As a device element, an ultrasonic oscillator 251 for theultrasonic flow meter is incorporated in the bottom wall portion 209 ofone of the lid members 205 for the ends of the tube 204 of the casing201, and an ultrasonic receiver 252 is incorporated in the bottom wallportion 209 of the other lid member 205.

The ultrasonic flow meter 117 can measure the flow amount on the basisof a phenomenon that an ultrasonic wave is Doppler-shifted by the flowof pure water, ultrapure water, chemical, or the like which enters intothe casing from the inlet port 230 disposed in the body wall portion 207of the one lid member 205, and flows through the tube 204 toward theoutlet port 231 disposed in the other lid member 205. The inlet port 230and the outlet port 231 disposed in the lid members 205 are connected toadequate places of the pipe conduit of the chemical supply piping systemB, as shown in FIG. 1. The other structures such as the structure of thecasing 201, and the structures for connecting the end portions of thetube 204 to the lid members 205 are identical with those of the heatexchanger 114. Therefore, like elements are designated by like numbersthroughout. Further description is omitted for convenience only and isnot limiting.

Referring to FIG. 10, in the manual deaerating device 118, the casing201 comprises: the tube 204 which is placed in a vertical posture; apair of upper and lower lid members 205 which hermetically close theupper and lower end portions of the tube 204, respectively; and theunion nuts 206 which fasten the lid members 205 to the upper and lowerend portions of the tube 204, respectively. As a device element, theinlet port 230 is incorporated in the body wall portion 207 of the upperlid member 205, and an air vent tube 253 and a manual air vent valve 254are incorporated in the bottom wall portion 209. The outlet port 231 isdisposed in the body wall portion 207 of the lower lid member 205. Inthe manual deaerating device 118, when the air vent valve 254 is opened,it is possible to remove away, for example, air bubbles in pure water,ultrapure water, or chemical, and which enters from the inlet port 230of the upper lid member 205, stagnates in the tube 204, and then flowsout to the outlet port 231 of the lower lid member 205. The inlet port230 and the outlet port 231 disposed in the lid members 205 areconnected to adequate places of the pipe conduit of the chemical supplypiping system B, as shown in FIG. 1. The other structures such as thestructure of the casing 201, and the structures for connecting the endportions of the tube 204 to the lid members 205 are identical with thoseof the heat exchanger 114. Therefore, the identical members and elementsare denoted by the same reference numerals, and their description isomitted.

Referring to FIG. 11, in the automatic deaerating device 119, anautomatic air vent valve 255 which operates in conjunction with aliquid-level sensor 256 disposed outside the tube 204 that is placed ina vertical posture is disposed in the air vent tube 253. When theliquid-level sensor 56 detects the liquid level in the tube 4, the airvent valve 255 is opened, so that air stagnating in the liquid isdischarged. The other configuration and function are identical withthose of the manual deaerating device of FIG. 10. Therefore, likeelements are designated by like numbers throughout. Further descriptionis omitted for convenience only and is not limiting.

Referring to FIG. 12, in the deaerating module 120, as a device element,plural gas-permeable tubes 257 made of a foamed fluororesin are passedin a bundled state through the tube 204, and a deaerating port 258 isdisposed in one of the lid members 205. The both ends of thegas-permeable tubes 257 are communicatingly connected to an inflow pipe261 and an outflow pipe 262 which are passed through inlet and outletports 259 and 260 disposed in the bottom wall portions 209 of the lidmembers 205 on the ends of the tube 204, respectively. The inflow pipe261 and the outflow pipe 262 are connected to adequate places of thepipe conduit of the chemical supply piping system B, as shown in FIG. 1.

In the deaerating module, while the pressure of the interior of the tube204 is reduced through the deaerating port 258 by a vacuum pump or thelike, for example, chemical is passed from the inflow pipe 261 throughthe gas-permeable tubes 257, and the deaerating operation is conductedin such a manner that gasses such as air dissolved in the chemicalpermeate the peripheral walls of the gas-permeable tubes 257 to bedissipated into the outside of the gas-permeable tubes 257. The chemicalwhich has undergone the deaerating process is discharged into theoutflow pipe 262. The other structures such as the structure of thecasing 201, and the structures for connecting the end portions of thetube 204 to the lid members 205 are similar to those of the heatexchanger 114. Therefore, like elements are designated by like numbersthroughout. Further description is omitted for convenience only and isnot limiting.

The deaerating module 120 shown in FIG. 12 can be used also as a gasdissolving device. When the module is used as a gas dissolving device,the deaerating port 258 is used as a soluble gas supplying port, and,for example, ultrapure water or chemical is passed from the inflow pipe261 through the gas-permeable tubes 257 while a soluble gas such asozone is supplied under pressure into the tube 204. The soluble gas inthe tube 204 permeates the peripheral wall of the gas-permeable tubes257 to be dissolved into the ultrapure water or chemical in thegas-permeable tubes 257. The to-be-processed liquid which has undergonethe dissolving process is discharged into the outflow pipe 262.

(Other Embodiments of the Casing of the Tube Device)

The overall shape of the casing 1 of the tube device can be formed intovarious shapes including an L-shape shown in FIG. 13, and a U-shapeshown in FIG. 14 in place of the linear pipe-like shape in theembodiments described above. In an L-shaped casing 1 shown in FIG. 13,two or first and second tubes 4A, 4B, two or first and second lidmembers 5A, 5B, and one elbow joint member 39 made of a synthetic resinsuch as a fluororesin are used. In a U-shaped casing 1 shown in FIG. 14,three or first, second, and third tubes 4A, 4B, 4C, two or first andsecond lid members 5A, 5B, and two or first and second elbow jointmembers 39A, 39B made of a synthetic resin such as a fluororesin areused.

In the L-shaped casing 1 shown in FIG. 13, the first and second lidmembers 5A, 5B are connected to end portions on one side of the firstand second tubes 4A, 4B by first union nuts 6, respectively, and theother ends of the first and second tubes 4A, 4B are connected to eachother by the single elbow joint member 39 and a pair of second unionnuts 40. In this case, the structure for connecting the first and secondlid members 5A, 5B to the end portions of the first and second tubes 4A,4B is configured in the same manner as that for connecting the endportions of the tube 4 to the lid members 5 in the embodiments describedabove.

In the joint member 39, connecting ports 41 are opened in the ends so asto perpendicularly communicate with each other, and the internalstructures of the connecting ports 41 are identical with those of thereceiving portions 8 of the lid members 5. Namely, first to thirdsealing faces are disposed inside each of the connecting ports 41 of thejoint member 39. The first sealing face is configured by a tapered facewhich is formed inner than the entrance of the connecting port 41, andin which the diameter is gradually increased toward the outer side inthe axial direction. The second sealing face is configured by a taperedface in which the diameter is gradually increased toward the outer sidein the axial direction. The third sealing face is configured by anannular groove which is formed in an inner portion of the connectingport 41 and in the radially outer side with respect to the first sealingface, and which elongates parallel to the axis. By contrast, inner rings15 having the same section shape as inner rings 15 in the end portionsof the first and second tubes 4A, 4B are pressingly inserted into theother end portions of the first and second tubes 4A, 4B. Therefore, theother end portion of the first tube 4A is connected to the connectingport 41 in the one end of the joint member 39, and that of the secondtube 4B is connected to the connecting port 41 in the other end. Theseconnections are conducted by connecting structures which are identicalwith those for connecting the end portions of the first and second tubes4A, 4B to the receiving portions 8 of the first and second lid members5A, 5B. A fluid tube 3 is perpendicularly bent inside the joint member39.

In the U-shaped casing 1 shown in FIG. 14, the first and second lidmembers 5A, 5B are connected to end portions on one side of the firstand second tubes 4A, 4B by first union nuts 6, and the third tube 4C isconnected between the other end portions of the first and second tubes4A, 4B by the two elbow joint members 39 and a pair of second union nuts40. In this case also, the structure for connecting the receivingportions 8 of the first and second lid members 5A, 5B to the endportions of the first and second tubes 4A, 4B is configured in the samemaimer as that for connecting the end portions of the tube 4 to the lidmembers 5 in the embodiments described above. The structure forconnecting the connecting ports 41 of the joint members 39 to the otherends of the first and second tubes 4A, 4B, and that for connecting theconnecting ports 41 of the joint members 39 to the both ends of thethird tube 4C are identical with that for connecting the end portions ofthe first and second tubes 4A, 4B to the receiving portions 8 of thefirst and second lid members 5A, 5B. The fluid tube 3 is perpendicularlybent inside the joint members 39.

Alternatively, the casing 1 may be formed into a shape in which theL-shaped casing 1 of FIG. 13 is combined with the U-shaped casing 1 ofFIG. 14.

When the casing 1 of the tube device is formed into an L-shape, aU-shape, or the like as described above, it is possible to build acompact piping system in which a dead space of pipes is effectivelyused. The device can be advantageously formed into a shape which cansatisfy a request for modifying a piping system, such as that for newlyinstalling a tube device in an existing piping system.

(Other Embodiments of the Sealing Portion)

In each of the sealing portions formed between the end portions of thetube 4 and the receiving portions 8 of the lid members 5, as in theembodiment shown in FIG. 3, the sealing property can be improved moresurely by, in addition to the first and second sealing portions 19, 21,further providing the third sealing portion 23 due to the cylindricalportion 24 of the inner ring 15 and the annular groove 13 of the lidmember 5. The structure of the sealing portion is not restricted tothis. As shown in FIG. 15, for example, a structure may be employed inwhich only the first and second sealing portions 19, 21 are formed, andthe third sealing portion 23 is omitted. In the structure, specifically,the annular groove 13 is not formed in an inner portion of the lidmember 5, and the cylindrical portion 24 is not disposed in the innerring 15. In this case, the first sealing face 10 disposed in an innerportion of the lid member 5 is configured by a tapered face in which thediameter is gradually reduced so as to intersect with the axis C in adirection opposite to that of the second sealing face 11, or toward theouter side in the direction of the axis C.

Alternatively, as shown in FIG. 16, a sealing face 42 formed by atapered face in which the diameter is larger than the inner diameter ofthe tube 4 is formed on the outer periphery of the end portion on thetip end side of the receiving portion 8 of the lid member 5, and anexternal thread portion 14 in which the diameter is larger than theouter diameter of the sealing face 42 is formed in the outer peripheryin rear of the sealing face 42. A flaring process is applied to the endportion of the tube 4 to form a large-diameter portion 43. Thelarge-diameter portion 43 in the end portion of the tube 4 is pressinglyfitted onto the sealing face 42 of the lid member 5. The union nut 6fitted onto the tube 4 is then screwed and fastened to the externalthread portion 14 of the lid member 5, so that the pressing edge 26 a ofthe annular flange 26 of the union nut 6 butts against the outer side ofthe tube 4 to axially press the inner peripheral face of thelarge-diameter portion 43 against the sealing face 42 of the receivingportion 8 to be closely contacted therewith, whereby a sealing portion44 is formed.

Alternatively, a sealing structure may be configured as shown in FIG.17. An inner ring 45 which is made of made of a synthetic resin such asa fluororesin, and which has an arcuate section shape is pressinglyinserted into the end portion of the tube 4 to increase the diameter ofthe end portion, thereby expanding the end portion so as to have amountain-like section shape. A union nut 6 screwed to an external threadportion 14 of the lid member 5 is screwingly advanced to firmly fastenthe end portion. As a result, the end portion of the tube 4 is pressedtogether with the inner ring 45 against a tapered sealing face 46disposed on the inner periphery of the receiving portion 8 of the lidmember 5, to be closely contacted therewith, thereby forming a sealingportion 47.

Alternatively, a sealing structure may be configured as shown in FIG.18. An outer ring 48 is fitted onto the end portion of the tube 4. Theterminal portion of the tube 4 is folded back onto the outer face of theouter ring 48. A union nut 6 screwed to an external thread portion 14 ofthe lid member 5 is screwingly advanced to firmly fasten the terminalportion. As a result, the end portion of the tube 4 is pressed togetherwith the outer ring 48 against a tapered sealing face 49 in thereceiving portion 8 of the lid member 5, to be closely contactedtherewith, thereby forming a sealing portion 50.

It is a matter of course that the invention can be similarly appliedalso to various piping systems other than a chemical supply pipingsystem in an apparatus for producing semiconductor devices.

1. A tube device including a casing, and a device element which isplaced in said casing, wherein said casing comprises: a tube made of asynthetic resin; a pair of lid members which are made of a syntheticresin; a pair of union nuts which are made of a synthetic resin andwhich are fitted onto one and other end portions of said tube, and whichare screwed to end portions of said lid members, respectively; and asealing portion which is formed in at least one place for each of saidend portions of said tube by closely contacting said end portion of saidtube with said sealing face of corresponding one of said lid members,said end portion of said tube and said sealing face of said lid memberbeing closely contacted with each other by causing corresponding one ofsaid union nuts to press said tube from an outside of said tube, saidunion nut fastening said end portion of said lid member by screwadvancement toward said end portion of said lid member; thereby pressingsaid tube from the outside of said tube, wherein said device element isa heat exchange tube which is made of a synthetic resin, and in which anouter periphery is surrounded by said tube made of synthetic resin andconnecting portions which are disposed on said pair of lid members madeof a synthetic resin, and to which outlet ports of said heat exchangetube, and pipes for introducing and discharging a fluid that is passedbetween an inner side of said casing and an outer side of said heatexchange tube are connected, respectively.
 2. A tube device according toclaim 1, wherein an inner ring is formed in each of said end portions ofsaid tube, said inner ring having: a press-insertion portion which ispressingly inserted into said end portion of said tube to increase adiameter of said end portion, thereby expanding said end portion so asto have a mountain-like section shape; and a projection portion whichprojects from said end portion of said tube, and whereby said tubedevice comprises a plurality of sealing portions for each of said endportions of said tube, said sealing portions being: a first sealingportion formed by close contact between a first sealing face beingconfigured by a tapered face which is formed inner than an entrance of areceiving port of said lid member, and in which a diameter is graduallyincreased toward an outer side in an axial direction of said lid member,and a projection end face being formed by a tapered face which is formedon a tip end of said projection portion of said inner ring; a secondsealing portion formed by pressingly holding said end portion of saidtube in an inclined state between a second sealing face which is formedin an entrance of said receiving port of said lid member by a taperedface intersecting with an axis of said lid member, and an inward taperedface which is formed on an inclined face of said press-insertion portionof said inner ring; and a third sealing portion formed by fitting acylindrical portion which is formed on a tip end of said projectionportion of said inner ring, into an annular groove which is formed at aradially outer side with respect to said sealing face that is formed onan inner portion of said receiving port of said lid member, said annulargroove extending parallel to an axis of said lid member.
 3. A tubedevice according to claim 1, wherein all of said tube, said lid members,and said union nuts are made of a fluororesin.
 4. A piping systemincluding a pipe conduit, and a tube device which is placed in a middleof said pipe conduit, said tube device comprising: a casing and a deviceelement which is placed in said casing, and said casing comprises a tubemade of a synthetic resin; a pair of lid members which are made of asynthetic resin, and each of which comprises a receiving port forreceiving an end portion of said tube, and at least one sealing facedisposed in said receiving port; a pair of union nuts which are made ofa synthetic resin, which are fitted onto one and other end portions ofsaid tube, and which are screwed to end portions of said lid membershaving said receiving ports, respectively; a sealing portion which isformed in at least one place for each of said end portions of said tubeby closely contacting said end portion of said tube with said sealingface of corresponding one of said lid members, said end portion of saidtube and said sealing face of said lid member being closely contactedwith each other by causing corresponding one of said union nuts to presssaid tube from an outside of said tube, said union nut fastening saidend portion of said lid member by screw advancement toward said endportion of said lid member, thereby pressing said tube from the outsideof said tube; and said device element is a heat exchange tube which ismade of a synthetic resin, and in which an outer periphery is surroundedby said tube made of a synthetic resin; and connecting portions whichare disposed in said lid members, and to which pipes for introducing anddischarging a fluid that is passed between an inner side of said casingand an outer side of said heat exchange tube are connected,respectively.
 5. A piping system according to claim 4, wherein an innerring is formed in each of said end portions of said tube, said innerring has: a press insertion portion which is pressingly inserted intosaid end portion of said tube to increase a diameter of said endportion, thereby expanding said end portion so as to have amountain-like section shape; and a projection portion which projectsfrom said end portion of said tube; said tube device comprises aplurality of said sealing portions for each of said end portions of saidtube, said sealing portions including a first sealing portion formed byclose contact between a sealing face configured by a tapered face whichis formed inner than an entrance of said receiving port of said lidmember, and in which a diameter is gradually increased toward an outerside in an axial direction of said lid member and a projection end faceformed by a tapered face which is formed in a tip end of said projectionportion of said inner ring, the sealing portions including a secondsealing portion formed by pressingly holding said end portion of saidtube in an inclined state between a sealing face which is formed in anentrance of said receiving port of said lid member by a tapered faceintersecting with an axis of said lid member and an inward tapered facewhich is formed on an inclined face of said press-insertion portion ofsaid inner ring and a third sealing portion formed by fitting acylindrical portion which is formed in a tip end of said projectionportion of said inner ring, into an annular groove which is formed in aradially outer side with respect to said sealing face that is formed inan inner portion of said receiving port of said lid member, said annulargroove elongating parallel to an axis of said lid member.
 6. A pipingsystem according to claim 4, wherein all of said tube, said lid members,and said union nuts are made of fluororesin.